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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (NanoScience and Technology)
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Product details
| Management number | 233379654 | Release Date | 2026/06/27 | List Price | US$29.79 | Model Number | 233379654 | ||
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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology. Read more
| ASIN | B07BLPWB1G |
|---|---|
| XRay | Not Enabled |
| ISBN13 | 978-3319762944 |
| Edition | 1st ed. 2018 |
| Language | English |
| File size | 9.4 MB |
| Page Flip | Enabled |
| Publisher | Springer |
| Word Wise | Enabled |
| Print length | 234 pages |
| Accessibility | Learn more |
| Screen Reader | Supported |
| Publication date | March 21, 2018 |
| Enhanced typesetting | Enabled |
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